▶ High-freedom logistics system configuration
▶ High speed (Max. 5m/s) and high precision position control (Max. 5μm)
▶ Different carrier weight correspondence (Max.5ton)
▶ Return Carrier Without Cable
▶ Up to 32 carriers can be independently controlled for speed and high precision position
▶ Sensing the position of the non-contact carrier using the hole sensor
▶ Various tracks can be configured, including linear tracks and oval tracks
▶ Semi-permanent life and easy maintenance
▶ Utilization of special environment
- Response to high temperature environment at 150°C
- Response to high vacuum, vacuum chamber environment
- Response to inert gas, chemical environment